phase 2 rotary table free sample

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PI’s direct-drive rotary tables with frictionless, brushless, closed-loop torque motors provide the best combination of high accuracy, high velocity, and maximum service life. PI provides closed-loop direct drive rotary tables with both mechanical bearings and air bearings. Stage models with large apertures and low profile are available. The stage design is optimized for high speed, stiffness, and high load capacity. If completely friction-free and maintenance free motion with virtually unlimited lifetime is required, air bearing rotation tables are recommended. These ultra-precision, high-speed rotary tables provide vibration-free motion with extremely high accuracy and negligible runout, wobble and eccentricity errors. The lack of lubricants makes these also clean room compatible and ideal for any high-performance metrology application in optics, photonics, and semiconductor manufacturing, test and metrology related projects.

In contrast to worm gear driven rotary stages or belt-drive rotation stages, torque-motor direct drive stages eliminate play in gears, couplings or flex in drive belts, providing motion with zero backlash and excellent constancy of velocity, while achieving higher speed than worm-gear drives.

PI’s precision direct-drive, positioning tables can be used in high performance factory automation, research, semiconductor, and laser processing applications. Due to the use of brushless high-torque, motors with direct metrology position feedback, backlash is completely eliminated, and reliability is greatly improved.

With modern direct-metrology rotary encoders, sensor resolution down to 1/100th of a microrad is available on select models with large rotary table platforms, using the high interpolation factors

Based on the high encoder resolution and powerful servo controllers, the direct-drive rotary tables also provide excellent velocity control, which is required in automation applications including high-speed laser processing, indexing, and semiconductor wafer inspection.

Most Direct Drive Rotation stages can be mounted horizontally and vertically, and with combinations all 3 rotary degrees of freedom (3DOF, pitch, yaw, and roll) can be addressed.

M-035 series high precision rotary tables rotation stages feature high resolution, excellent repeatability and minimum wobble. These high performance rotational positioning stages are equipped with double ball bearings for minimum backlash and high load capacity. Both the rotation stage platform and the scale ring (graduated in 2-degree increments) can be independently coarse positioned over 360 degrees and then be locked by screws.

The basic rotary table version, M-035.D0, is equipped with a DC servo motor drive providing a positioning range of ± 6.3 degrees. A set of limit switches eliminates the possibility of overtravel. For the highest precision and highest performance, high speed air bearing rotary tables are recommended.

The versions M-035.DS and M-035.DP provide additional piezoelectric fine adjustment over a range of ±520 µrad. The piezoelectric fine adjustment also allows dynamic operation such as scanning or tracking. The .DS version is equipped with a closed loop PZT drive (model P-841.30), while the .DP version comes with an open loop PZT drive (model P-840.30). Both drives provide a linear range of 45 microns and sub-nanometer linear resolution (see "PZT Actuators" section for further details and recommended drivers).

The DGII Series is a line of of products that combine a high rigidity hollow rotary table with an AlphaStep closed loop stepper motor and driver package. It retains the ease of use of a stepper motor, while also allowing for highly accurate positioning of large inertia loads.

The gear-reduction mechanism employs precision gears along with a proprietary adjustment mechanism that eliminates backlash. The repetitive positioning accuracy from a single direction is ±15 sec., while lost motion in a positioning operation from two directions is 2 arc minutes. These characteristics make the DGII series the ideal choice for applications in which accurate positioning is a must.

This compact closed-loop direct drive rotary table uses a 3-phase motor for maintenance free, frictionless power transmission. It comes in two variations, standard and with holding brake.

Application video of the silent ultrasonic piezo motor rotary stage in a Leica Theodolite and Principle Design of the PILine drive used in the M-660 PILine� rotary stage

This miniaturized closed-loop rotary positioner is driven by an ultrasonic direct-drive motor and provides high rotational velocity up to 3 revolutions / second. An optical encoder is integrated for direct position measurement and feedback with 35 �rad resolution.

A fast ultrasonic ceramic ring-shaped resonator motor provides high speed to 120 RPM. An optical direct metrology encoder is integrated for position feedback.

Q-motion series miniature rotation stages are driven by inertia-type piezo motors. These miniaturized positoining tables are direct-driven, backlash free and provide micro-radian resolution. The self-locking design requires no holding current and provides excellent long-term stability. Three different diameters are available: 14 mm, 22 mm and 32 mm.

This Hexapod provides 6 degrees of freedom: rotation around 3 axes and 3 linear motions in one compact, vacuum-compatible package. It can handle loads up to 11 lbs (5kg) and move at velocities to 10 mm/sec. The combination of linear motion and rotation angles of 20� around the X and Y axis and up to 40� around the vertical axis allows for complex motion profiles with particularly flexible placement of the load - a great advantage in restricted areas (such as beam lines) and small vacuum chambers.

P-5x8 series, Z/tip/tilt nanopositioners are open-frame, high-resolution, piezo-driven stages providing Z motion to 240 �m and rotation around X and Y to 2.4 mrad with resolutions of up to 0.5 nm and 50 nrad. The 66 x 66 mm clear aperture is ideal for transmitted-light applications.

This piezo platform can rotate a mirror or optic up to 2 mrad (4 mrad optical deflection) around two orthogonal axes. The parallel-kinematic, solid-state piezo drive system guarantees exceptional precision and very fast response in the low millisecond range and below.

S-224/S-226 miniature tilt platforms provide rotation of 2.2 mrad around the Y-axis. They are extremely fast with resonse in the microsecond range. A �15x4mm BK7 glass mirror is mounted.